Neural network tuning of radio frequency plasma sources.

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dc.collegelasen_US
dc.contributor.authorJones, Robert W.
dc.date.accessioned2012-02-01T22:11:35Z
dc.date.available2012-02-01T22:11:35Z
dc.date.created2001en_US
dc.date.issued2012-02-01
dc.departmentphysical sciencesen_US
dc.description[73]-81 p.en_US
dc.language.isoen_USen_US
dc.relation.ispartofseriesEmporia State Research Studies;v. 42 no.4
dc.subjectRadio frequency.en_US
dc.titleNeural network tuning of radio frequency plasma sources.en_US
dc.typeArticleen_US

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